Within this paper, the new lapping slurry and polishing slurry are introduced. As well as deliquescence degree of CLBO is fallen to cheapest. A completely new Doing work technological know-how is usually adopted. Following rough sprucing, the focus of ultra-precision sharpening slurry is enhanced thoroughly. So does the ultra-precision polishing speed, and the wiping velocity is faster compared to deliquescence velocity. The CLBO crystal floor roughness can attain 1nm and preserve the surface area top quality perfectly. Access by way of your institution
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The average power of your NIR laser even now has the prospective to become enhanced to tens of watts including 70 W [26] If your double-pass configuration could be used to the Yb:YAG SCF amplifier phase. For this reason, In the event the conversion efficiency of 31% from NIR to DUV may very well be nevertheless managed at this larger electric power situation, the common output ability from the DUV laser at 258 nm could possibly be greater than 20 W, which would be a exceptional electricity stage for that DUV laser and result in the unanticipated DUV laser machining benefits. What's more, for top-power DUV laser, the UV damage of the nonlinear crystal, such as the Home windows for CLBO crystal and the mirrors, is another vital parameter for long term and steady Procedure.
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From the scientific and industrial applications, the beam high quality in the DUV laser is likewise a vital parameter. Notably, the beam top quality from the DUV laser dramatically has an effect on the laser machining effects. The beam top quality on the DUV laser is determined by that of the elemental laser as well as the crystal for the frequency conversion. Not long ago, a large-power DUV laser (>10 W) at 258 nm was claimed that has a beam high quality of M2 < 1.5, which was produced by FHG of the Yb:YAG laser at 1030 nm using the CLBO crystal [thirteen]. This laser would result in an improved laser machining final result in comparison with the past DUV lasers with larger sized M2.
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The beam profile demonstrated in Determine 7b demonstrated a superb beam excellent as one of several deserves of Raman laser, which would be valuable to crank out a 193-nm DUV laser with a top quality beam.
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